WebApr 13, 2024 · The Raman spectra indicated that four-cup polishing had no obvious influence on the original surface crystallinity and phase composition of the HDC capsules. The crystallographic of the HDC capsules with different four-cup polishing times had no deterioration. This work plays an important role for the application of HDC capsules in ICF … WebJan 1, 2011 · Plasma-assisted polishing using a CeO 2 abrasive enabled us to improve the surface roughness of a commercially available SiC wafer without introducing crystallographical subsurface damage, and a scratch-free atomically flat surface with an rms roughness of 0.1 nm level was obtained.
Damage-Free Dry Polishing of 4H-SiC Combined with Atmospheric …
WebApr 11, 2024 · ABSTRACT. Ultra-high-temperature ceramics are required for many aerospace applications. In this work, HfB 2-30 vol.% HfC and HfB 2-26 vol.% HfC-43 vol.% MoB high-density composites were prepared by one-step in-situ reactive spark plasma sintering (R-SPS) using Hf, B 4 C and Mo powders as starting materials. The influences of sintering … WebJan 1, 2013 · Plasma assisted polishing (PAP), in which the irradiation of atmospheric pressure water vapor plasma and ceria (CeO 2) abrasive polishing are combined, is a … csi financial planning integration course
Atomic-scale flattening mechanism of 4H-SiC (0 0 0 1) in plasma ...
WebApr 11, 2024 · Figure 1 depicts the mechanism of PaE integrated with low-pressure polishing, i.e., PLPP. The plasma torch generates abundant hydroxyl (OH*) radicals and blows them onto the Lu 2 O 3 single crystal surface. OH* has a larger oxidation–reduction potential (2.80 V) than O (2.42 V) [56].When the Lu 2 O 3 surface is exposed to plasma … WebJan 13, 2024 · Single-crystal SiC is a typical third-generation semiconductor power-device material because of its excellent electronic and thermal properties. An ultrasmooth surface with atomic surface roughness that is scratch free and subsurface damage (SSD) free is indispensable before its application. As the last process to reduce the surface roughness … WebAug 22, 2011 · A dry polishing technique combined with the atmospheric-pressure water vapor plasma oxidation has been proposed for the high-integrity smoothing of SiC … eagle credit card processing